Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment

• Xiaomei Zeng,
• Vasiliy Pelenovich,
• Bin Xing,
• Rakhim Rakhimov,
• Wenbin Zuo,
• Alexander Tolstogouzov,
• Chuansheng Liu,
• Dejun Fu and
• Xiangheng Xiao

Beilstein J. Nanotechnol. 2020, 11, 383–390, doi:10.3762/bjnano.11.29

• parallel steps or ribs. The more ordered ripple formation on nanorods can be associated with the confinement of the nanorod facets in comparison with the quasi-infinite surface of the flat substrates. Keywords: cluster ion bombardment; gas cluster ion beam; surface ripples; ZnO nanorods; Introduction The

Numerical investigation of depth profiling capabilities of helium and neon ions in ion microscopy

• Patrick Philipp,
• Lukasz Rzeznik and
• Tom Wirtz

Beilstein J. Nanotechnol. 2016, 7, 1749–1760, doi:10.3762/bjnano.7.168

• blurring out of the in-depth information. In general, the depth resolution is not as good as the 1 nm to few nm resolution obtained with below keV heavy primary ions [34] or cluster ion bombardment [35], but a good compromise between depth and lateral resolution. For few keV impact energies, depth

Experimental and simulation-based investigation of He, Ne and Ar irradiation of polymers for ion microscopy

• Lukasz Rzeznik,
• Yves Fleming,
• Tom Wirtz and
• Patrick Philipp

Beilstein J. Nanotechnol. 2016, 7, 1113–1128, doi:10.3762/bjnano.7.104

• HIM has been developed for high resolution electron microscopy and nanofabrication using the He+ or Ne+-emitting atomic level ion source (ALIS) [4]. Compared to cluster ion bombardment, the use of monoatomic primary ion species (such as Cs+, O−, Ga+) for imaging in SIMS allows significantly higher